Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching

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Authors

Gul, Banat; Tinck, Stefan; De Schepper, Peter; Rehman, Aman-ur

ISSN

0022-3727

Issue

2

Journal

Journal of Physics D: Applied Physics

Volume

48

Title

Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching

Publication type

Journal article

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