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Epitaxial Ge Growth in Ultra Narrow STI Patterned Si Wafer
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Authors
Hikavyy, Andriy
;
Loo, Roger
;
Sun, Jianwu
;
Shimura, Yosuke
;
Bender, Hugo
;
Caymax, Matty
;
Thean, Aaron
Conference
EMRS Fall Meeting Symposium O: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques & Appl.
Title
Epitaxial Ge Growth in Ultra Narrow STI Patterned Si Wafer
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