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Epitaxial Ge Growth in Ultra Narrow STI Patterned Si Wafer
Publication:
Epitaxial Ge Growth in Ultra Narrow STI Patterned Si Wafer
Date
2015
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Loo, Roger
;
Sun, Jianwu
;
Shimura, Yosuke
;
Bender, Hugo
;
Caymax, Matty
;
Thean, Aaron
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Abstract
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1861
since deposited on 2021-10-22
Acq. date: 2025-10-28
Citations
Metrics
Views
1861
since deposited on 2021-10-22
Acq. date: 2025-10-28
Citations