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Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach

dc.contributor.authorHoenicke, Philipp
dc.contributor.authorDetlefs, Blanka
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMueller, Matthias
dc.contributor.authorNolot, Emmanuel
dc.contributor.authorGrampeix, Helen
dc.contributor.authorBeckhoff, Burkhard
dc.date.accessioned2021-10-22T19:43:46Z
dc.date.available2021-10-22T19:43:46Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25390
dc.sourceIIOimport
dc.titleReference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach
dc.typeProceedings paper
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage167
dc.source.endpage169
dc.source.conferenceInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN
dc.source.conferencedate14/04/2015
dc.source.conferencelocationDresden Germany
dc.identifier.urlhttps://www.nist.gov/sites/default/files/documents/pml/div683/conference/FCMN_CD.pdf
imec.availabilityPublished - open access


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