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Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects

dc.contributor.authorIke, Shinichi
dc.contributor.authorSimoen, Eddy
dc.contributor.authorShimura, Yosuke
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorLoo, Roger
dc.contributor.authorTakeuchi, Wakana
dc.contributor.authorNakatsuka, Osamu
dc.contributor.authorZaima, Shigeaki
dc.date.accessioned2021-10-22T19:49:25Z
dc.date.available2021-10-22T19:49:25Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25410
dc.sourceIIOimport
dc.titleInfluence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpageG4.4
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate27/09/2015
dc.source.conferencelocationSapporo Japan
dc.identifier.urlhttps://confit.atlas.jp/guide/event/ssdm2015/subject/G-4-4/class?cryptoId=
imec.availabilityPublished - imec


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