Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects

Publication:

2015

Proceedings Paper

Author(s)

Ike, Shinichi

;

;

Shimura, Yosuke

;

;

;

;

Takeuchi, Wakana

;

Nakatsuka, Osamu

;

Zaima, Shigeaki

1842 since deposited on 2021-10-22

Acq. date: 2026-04-27