Publication:
Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1840 since deposited on 2021-10-22
Acq. date: 2025-12-08
Citations
Metrics
Views
1840 since deposited on 2021-10-22
Acq. date: 2025-12-08
Citations