Authors

Jayachandran, Suseendran; Delabie, Annelies; Billen, Arne; Dekkers, Harold; Douhard, Bastien; Conard, Thierry; Meersschaut, Johan; Caymax, Matty; Vandervorst, Wilfried; Heyns, Marc

ISSN

0169-4332

Journal

Applied Surface Science

Volume

324

Title

Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry

Publication type

Journal article