SrTiOx for sub-20 nm DRAM technology nodes - characterization and modeling

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Authors

Kaczer, Ben; Larcher, Luca; Vandelli, Luca; Reisinger, Hans; Popovici, Mihaela Ioana; Clima, Sergiu; Ji, Zhigang; Joshi, Saumya; Swerts, Johan; Redolfi, Augusto; Afanasiev, Valeri; Jurczak, Gosia

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

147

Title

SrTiOx for sub-20 nm DRAM technology nodes - characterization and modeling

Publication type

Journal article

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