Effect of 4-point bending test procedure on crack propagation in thin film stacks

Thumbnail
View/open
Metadata
Show full item record
Authors
Kljucar, Luka; Gonzalez, Mario; Vanstreels, Kris; Ivankovic, Andrej; Hecker, Michael; De Wolf, Ingrid
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
137
Title
Effect of 4-point bending test procedure on crack propagation in thin film stacks
Publication type
Journal article
Embargo date
9999-12-31
Collections