Publication:

N7 middle of line etch challenges and solutions

Date

2015

Meeting abstract

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Files

31547.pdf 89.53 KB

Author(s)

;

;

Demuynck, Steven

;

Versluijs, Janko

;

Boemmels, Juergen

;

Ryckaert, Julien

Statistics

1946 since deposited on 2021-10-22

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Acq. date: 2026-02-25