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Capacitive micromachined ultrasonic transducers for acoustic manipulation

dc.contributor.authorMao, Shengping
dc.contributor.authorZhong, Kuo
dc.contributor.authorRochus, Veronique
dc.contributor.authorSeveri, Simone
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-22T20:51:49Z
dc.date.available2021-10-22T20:51:49Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25607
dc.sourceIIOimport
dc.titleCapacitive micromachined ultrasonic transducers for acoustic manipulation
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage662
dc.source.endpage665
dc.source.conference18th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate21/06/2015
dc.source.conferencelocationAnchorage, AL USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7181010
imec.availabilityPublished - open access


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