Authors

Minjauw, Matthias; Dendooven, Jolien; Capon, Boris; Schaekers, Marc; Detavernier, Christophe

ISSN

2050-7526

Issue

19

Journal

Journal of Materials Chemistry C

Volume

3

Title

Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4 -precursor and H2 -plasma

Publication type

Journal article