Publication:
Modeling FinFET metal gate stack resistance for 14nm node and beyond
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1 since deposited on 2021-10-22
Acq. date: 2026-02-25
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1885 since deposited on 2021-10-22
Acq. date: 2026-02-25
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1 since deposited on 2021-10-22
Acq. date: 2026-02-25
Views
1885 since deposited on 2021-10-22
Acq. date: 2026-02-25
Citations