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Metal thin films etching in supercritical CO2 fluid

dc.contributor.authorNakamura, Y.
dc.contributor.authorWatanabe, M.
dc.contributor.authorKondoh, E.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T21:21:49Z
dc.date.available2021-10-22T21:21:49Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25688
dc.sourceIIOimport
dc.titleMetal thin films etching in supercritical CO2 fluid
dc.typeMeeting abstract
dc.source.peerreviewyes
dc.source.beginpage11a-A29-2
dc.source.conference62nd Japan Society of Applied Physics Spring Meeting
dc.source.conferencedate11/03/2015
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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