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The stability of platinum heater and temperature sensing elements for silicon integrated tin oxide gas sensors
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Authors
Esch, Heleen
;
Huyberechts, Guido
;
Mertens, Robert
;
Maes, Guido
;
Manca, Jean
;
De Ceuninck, Ward
;
De Schepper, Luc
Conference
Technical Digest of the 7th International Meeting on Chemical Sensors
Title
The stability of platinum heater and temperature sensing elements for silicon integrated tin oxide gas sensors
Publication type
Proceedings paper
Embargo date
9999-12-31
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