Authors

Noda, Taiji; Vrancken, Christa; Vandervorst, Wilfried; Horiguchi, Naoto

ISSN

0018-9383

Issue

6

Journal

IEEE Transactions on Electron Devices

Volume

62

Title

Atomistic modeling of pocket dopant deactivation and its impact on Vth variation in scaled Si planar devices using an atomistic kinetic Monte Carlo approach

Publication type

Journal article

Embargo date

9999-12-31