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The stability of platinum heater and temperature sensing elements for silicon integrated tin oxide gas sensors

dc.contributor.authorEsch, Heleen
dc.contributor.authorHuyberechts, Guido
dc.contributor.authorMertens, Robert
dc.contributor.authorMaes, Guido
dc.contributor.authorManca, Jean
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorDe Schepper, Luc
dc.date.accessioned2021-09-30T11:56:26Z
dc.date.available2021-09-30T11:56:26Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2569
dc.sourceIIOimport
dc.titleThe stability of platinum heater and temperature sensing elements for silicon integrated tin oxide gas sensors
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorDe Ceuninck, Ward
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage583
dc.source.endpage585
dc.source.conferenceTechnical Digest of the 7th International Meeting on Chemical Sensors
dc.source.conferencedate27/06/1998
dc.source.conferencelocationBeijing China
imec.availabilityPublished - open access


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