Publication:
Status update on a new class of solution processable low-k dielectric coating for use as ILD with k <2.4
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1793 since deposited on 2021-10-22
2last month
Acq. date: 2026-05-18
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Statistics
Views
1793 since deposited on 2021-10-22
2last month
Acq. date: 2026-05-18
Citations