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Status update on a new class of solution processable low-k dielectric coating for use as ILD with k <2.4
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Status update on a new class of solution processable low-k dielectric coating for use as ILD with k <2.4
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Date
2015
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pakbaz, Hash
;
Hacker, N
;
Tokei, Zsolt
;
Baklanov, Mikhaïl
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Abstract
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1791
since deposited on 2021-10-22
Acq. date: 2025-12-18
Citations
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Views
1791
since deposited on 2021-10-22
Acq. date: 2025-12-18
Citations