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Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow

dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorChan, BT
dc.contributor.authorBayana, Hareen
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorVan Look, Lieve
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorCao, Yi
dc.contributor.authorKim, YiHoon
dc.contributor.authorLin, G.
dc.contributor.authorParnell, Doni
dc.contributor.authorNafus, Kathleen
dc.contributor.authorHarukawa, Ryoto
dc.contributor.authorChikashi, Ito
dc.contributor.authorNagaswami, Venkat
dc.contributor.authorD'Urzo, Lucia
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-22T21:41:59Z
dc.date.available2021-10-22T21:41:59Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25740
dc.sourceIIOimport
dc.titleDefect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
dc.typeProceedings paper
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorBayana, Hareen
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.imecauthorD'Urzo, Lucia
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage94230M
dc.source.conferenceAlternative Lithographic Technologies VII
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210739
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9423


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