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Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns

dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorChan, BT
dc.contributor.authorVan Look, Lieve
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorCross, Andrew
dc.contributor.authorHong, Sung Eun
dc.contributor.authorNafus, Kathleen
dc.contributor.authorD'Urzo, Lucia
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-22T21:42:56Z
dc.date.available2021-10-22T21:42:56Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25742
dc.sourceIIOimport
dc.titleCapture probability of assembly defects in 14 nm half-pitch line/space DSA patterns
dc.typeMeeting abstract
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorCross, Andrew
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.imecauthorD'Urzo, Lucia
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageWed-A6-c1
dc.source.conference41st International Conference on Micro- and Nanofabrication - MNE
dc.source.conferencedate21/09/2015
dc.source.conferencelocationDen Haag The Netherlands
imec.availabilityPublished - open access


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