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Phase formation and morphology of nickel silicide thin films synthesized by catalyzed chemical vapor reaction of nickel with silane
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Authors
Peter, Antony
;
Meersschaut, Johan
;
Richard, Olivier
;
Moussa, Alain
;
Steenbergen, Johnny
;
Schaekers, Marc
;
Tokei, Zsolt
;
Van Elshocht, Sven
;
Adelmann, Christoph
ISSN
0897-4756
Issue
1
Journal
Chemistry of Materials
Volume
27
Title
Phase formation and morphology of nickel silicide thin films synthesized by catalyzed chemical vapor reaction of nickel with silane
Publication type
Journal article
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