Authors

Mieville, Jean-Paul; Van den Bosch, Geert; Deferm, Ludo; Bellens, Rudi; Groeseneken, Guido; Maes, Herman; Schoenmaker, Wim

Conference

Technical Digest International Electron Devices Meeting - IEDM

Title

FOND (Fully Overlapped Nitride-Etch Defined Device): A New Device Architecture for High-Reliability and High-Performance Deep Submicron CMOS Technology

Publication type

Proceedings paper