Supercritical CO2 etching of metal thin films for magnetoresistive memory processing
dc.contributor.author | Rasadujjaman, M | |
dc.contributor.author | Nakamura, Y. | |
dc.contributor.author | Watanabe, M. | |
dc.contributor.author | Kondoh, E. | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-22T22:08:11Z | |
dc.date.available | 2021-10-22T22:08:11Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25803 | |
dc.source | IIOimport | |
dc.title | Supercritical CO2 etching of metal thin films for magnetoresistive memory processing | |
dc.type | Meeting abstract | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.conference | 41st Micro and Nanoengineering Conference - MNE | |
dc.source.conferencedate | 21/09/2015 | |
dc.source.conferencelocation | Delft Nederlands | |
imec.availability | Published - open access |