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CMOS integrated poly-SiGe MEMS accelerometer above 0.18 $lm technology

dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorHelin, Philippe
dc.contributor.authorvan den Hoven, Richard
dc.contributor.authorSeveri, Simone
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorYazicioglu, Refet Firat
dc.contributor.authorWitvrouw, An
dc.contributor.authorFrancis, L.A.
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-22T22:08:38Z
dc.date.available2021-10-22T22:08:38Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25804
dc.sourceIIOimport
dc.titleCMOS integrated poly-SiGe MEMS accelerometer above 0.18 $lm technology
dc.typeProceedings paper
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage11
dc.source.endpage14
dc.source.conference18th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate21/06/2015
dc.source.conferencelocationAnchorage, AL USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/abstractAuthors.jsp?arnumber=7180848
imec.availabilityPublished - open access


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