Authors

Ray Chaudhuri, Ashesh; Helin, Philippe; van den Hoven, Richard; Severi, Simone; Rottenberg, Xavier; Yazicioglu, Refet Firat; Witvrouw, An; Francis, L.A.; Tilmans, Harrie

Conference

18th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS

Title

CMOS integrated poly-SiGe MEMS accelerometer above 0.18 $lm technology

Publication type

Proceedings paper

Embargo date

9999-12-31