Publication:

CMOS integrated poly-SiGe MEMS accelerometer above 0.18 $lm technology

Date

2015

Proceedings Paper

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Files

31562.pdf 1.31 MB

Author(s)

Ray Chaudhuri, Ashesh

;

Helin, Philippe

;

van den Hoven, Richard

;

;

Rottenberg, Xavier

;

Yazicioglu, Refet Firat

;

;

;

Tilmans, Harrie

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Acq. date: 2026-05-02