Publication:

CMOS integrated poly-SiGe MEMS accelerometer above 0.18 $lm technology

Date

2015
Proceedings Paper
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dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorHelin, Philippe
dc.contributor.authorvan den Hoven, Richard
dc.contributor.authorSeveri, Simone
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorYazicioglu, Refet Firat
dc.contributor.authorWitvrouw, An
dc.contributor.authorFrancis, L.A.
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-22T22:08:38Z
dc.date.available2021-10-22T22:08:38Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25804
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/abstractAuthors.jsp?arnumber=7180848
dc.source.beginpage11
dc.source.conference18th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate21/06/2015
dc.source.conferencelocationAnchorage, AL USA
dc.source.endpage14
dc.title

CMOS integrated poly-SiGe MEMS accelerometer above 0.18 $lm technology

dc.typeProceedings paper
dspace.entity.typePublication
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