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Impact of UV wavelength and curing time on the properties of spin-coated low-k films

dc.contributor.authorRedzheb, Murad
dc.contributor.authorPrager, Lutz
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorArmini, Silvia
dc.contributor.authorVanstreels, Kris
dc.contributor.authorFranquet, Alexis
dc.contributor.authorVan Der Voort, Pascal
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T22:10:54Z
dc.date.available2021-10-22T22:10:54Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25809
dc.sourceIIOimport
dc.titleImpact of UV wavelength and curing time on the properties of spin-coated low-k films
dc.typeProceedings paper
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage99
dc.source.endpage102
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM
dc.source.conferencedate19/05/2015
dc.source.conferencelocationGrenoble France
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325641
imec.availabilityPublished - open access


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