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Electrical verification of contact holes obtained with DSA of BCP

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorBekaert, Joost
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorGronheid, Roel
dc.contributor.authorChan, BT
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorLuong, Vihn
dc.date.accessioned2021-10-22T22:16:17Z
dc.date.available2021-10-22T22:16:17Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25822
dc.sourceIIOimport
dc.titleElectrical verification of contact holes obtained with DSA of BCP
dc.typeProceedings paper
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewno
dc.source.conference1st International Symposium on DSA
dc.source.conferencedate25/10/2015
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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