Microscopic oxide defects causing BTI, RTN, and SILC on high-K FinFETs

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Authors
Rzepa, Gerhard; Waltl, Michael; Goes, Wolfgang; Kaczer, Ben; Grasser, Tibor
Conference
International Conference on Simulation of Semiconductor Processes and Devices - SISPAD
Title
Microscopic oxide defects causing BTI, RTN, and SILC on high-K FinFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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