dc.contributor.author | Schulze, Andreas | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | van Dorp, Dennis | |
dc.contributor.author | Gachet, David | |
dc.contributor.author | Berney, Jean | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Caymax, Matty | |
dc.date.accessioned | 2021-10-22T22:41:09Z | |
dc.date.available | 2021-10-22T22:41:09Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25880 | |
dc.source | IIOimport | |
dc.title | Recent progress in advanced in-line metrology for high-mobility semiconductors | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | van Dorp, Dennis | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | van Dorp, Dennis::0000-0002-1085-4232 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 85 | |
dc.source.endpage | 87 | |
dc.source.conference | Frontiers of Characterization and Metrology for Nanoelectronics - FCMN | |
dc.source.conferencedate | 14/04/2015 | |
dc.source.conferencelocation | Dresden Germany | |
dc.identifier.url | http://www.nist.gov/pml/div683/conference/2015_presentations.cfm | |
imec.availability | Published - open access | |