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Reverse replication of circular micro grating structures with soft lithography

dc.contributor.authorShang, Xiaobing
dc.contributor.authorMissinne, Jeroen
dc.contributor.authorTeigell Beneitez, Nuria
dc.contributor.authorJablonski, Michal
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorJoshi, Pankaj
dc.contributor.authorCuypers, Dieter
dc.contributor.authorBaghdasaryan, T.
dc.contributor.authorVervaeke, Michael
dc.contributor.authorThienpont, Hugo
dc.contributor.authorDe Smet, Herbert
dc.date.accessioned2021-10-22T22:45:56Z
dc.date.available2021-10-22T22:45:56Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25891
dc.sourceIIOimport
dc.titleReverse replication of circular micro grating structures with soft lithography
dc.typeProceedings paper
dc.contributor.imecauthorMissinne, Jeroen
dc.contributor.imecauthorTeigell Beneitez, Nuria
dc.contributor.imecauthorCuypers, Dieter
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.orcidimecMissinne, Jeroen::0000-0002-3470-620X
dc.contributor.orcidimecCuypers, Dieter::0000-0003-0550-6273
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage96610V
dc.source.conference31st European Mask and Lithography Conference
dc.source.conferencedate22/06/2015
dc.source.conferencelocationEindhoven The Netherlands
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2436957
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9661


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