Authors

Shimura, Yosuke; Srinivasan, Ashwyn; Van Thourhout, Dries; Van Deun, Rik; Pantouvaki, Marianna; Van Campenhout, Joris; Loo, Roger

Conference

E-MRS Fall Meeting, Symposium O: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques and ...

Title

Enhanced Ge photoluminescence by increasing the active P doping using high order Ge precursors at lower growth temperatures

Publication type

Meeting abstract

Embargo date

9999-12-31