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Increase in oxide trap density due to the implementation of high-k and Al2O3 cap layers in thick-oxide input-output transistors for DRAM applications
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Increase in oxide trap density due to the implementation of high-k and Al2O3 cap layers in thick-oxide input-output transistors for DRAM applications
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Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Ritzenthaler, Romain
;
Cho, Moon Ju
;
Schram, Tom
;
Horiguchi, Naoto
;
Aoulaiche, Marc
;
Spessot, Alessio
;
Fazan, Pierre
;
Claeys, Cor
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1808
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations
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Views
1808
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations