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Advanced doping techniques for DRAM peripheral MOSFETs

dc.contributor.authorSpessot, Alessio
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorCho, Moon Ju
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorFazan, Pierre
dc.date.accessioned2021-10-22T23:05:15Z
dc.date.available2021-10-22T23:05:15Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25934
dc.sourceIIOimport
dc.titleAdvanced doping techniques for DRAM peripheral MOSFETs
dc.typeMeeting abstract
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorFazan, Pierre
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageAA.V1
dc.source.conferenceE-MRS Spring Meeting Symposuium AA: Non-Volatile Memories: Materials, Nanostructures and Integration Approaches
dc.source.conferencedate11/05/2015
dc.source.conferencelocationLille France
imec.availabilityPublished - open access


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