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Reliability impact of advanced doping techniques for DRAM peripheral MOSFETs
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Authors
Spessot, Alessio
;
Ritzenthaler, Romain
;
Schram, Tom
;
Aoulaiche, Marc
;
Cho, Moon Ju
;
Toledano Luque, Maria
;
Horiguchi, Naoto
;
Fazan, Pierre
Conference
International Conference on IC Design and Technology - ICICDT
Title
Reliability impact of advanced doping techniques for DRAM peripheral MOSFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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