Paramagnetic oxide traps in Sc2O3-passivated (1 0 0) Ge/HfO2 stacks

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Authors
Stesmans, Andre; Iacovo, S.; Cott, Daire; Thean, Aaron; Arimura, Hiroaki; Sioncke, Sonja; Afanas'ev, Valeri
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
147
Title
Paramagnetic oxide traps in Sc2O3-passivated (1 0 0) Ge/HfO2 stacks
Publication type
Journal article
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