Authors

Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Meersschaut, Johan; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-Francois; Bender, Hugo; Struyf, Herbert; Detavernier, Christophe; Baklanov, Mikhaïl; De Feyter, Steven; Armini, Silvia

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

137

Title

Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films

Publication type

Journal article

Embargo date

9999-12-31