Publication:

Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films

Date

2015

Journal article

Simple item page Full metadata Statistics

Files

30208.pdf 1.54 MB

Author(s)

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Levrau, Elisabeth

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;

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Meersschaut, Johan

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Franquet, Alexis

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de Marneffe, Jean-Francois

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Struyf, Herbert

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Detavernier, Christophe

;

Baklanov, Mikhaïl

;

De Feyter, Steven

;

Journal

Microelectronic Engineering

Metrics

1925 since deposited on 2021-10-22

Acq. date: 2025-12-18