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Impact of fin shape variability on device performance towards 10nm node

dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorHiraga, Keizo
dc.contributor.authorDehan, Morin
dc.contributor.authorHellings, Geert
dc.contributor.authorJang, Doyoung
dc.contributor.authorMiyaguchi, Kenichi
dc.contributor.authorChiarella, Thomas
dc.contributor.authorKim, Min-Soo
dc.contributor.authorMocuta, Anda
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-22T23:37:04Z
dc.date.available2021-10-22T23:37:04Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26002
dc.sourceIIOimport
dc.titleImpact of fin shape variability on device performance towards 10nm node
dc.typeProceedings paper
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorHiraga, Keizo
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorMiyaguchi, Kenichi
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecMiyaguchi, Kenichi::0000-0002-7073-6457
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceInternational Conference on IC Design & Technology - ICICDT
dc.source.conferencedate1/06/2015
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7165884
imec.availabilityPublished - imec


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