Publication:

Formation, processing and characterization of Co-Sn intermetallic compounds for potential integration in 3D interconnects

Date

2015
Journal article
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Author(s)

Vakanas, George
;
O, Minho
;
Dimcic, Biljana
;
Vanstreels, Kris  
;
Vandecasteele, Bjorn  
;
De Preter, Inge  
;
Derakhshandeh, Jaber  
;
Rebibis, Kenneth June  
;
Kajihara, Masanori
;
De Wolf, Ingrid  
;
Beyne, Eric  

Journal

Microelectronic Engineering

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1941 since deposited on 2021-10-22
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