Authors

Vakanas, George; O, Minho; Dimcic, Biljana; Vanstreels, Kris; Vandecasteele, Bjorn; De Preter, Inge; Derakhshandeh, Jaber; Rebibis, Kenneth June; Kajihara, Masanori; De Wolf, Ingrid; Beyne, Eric

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

140

Title

Formation, processing and characterization of Co-Sn intermetallic compounds for potential integration in 3D interconnects

Publication type

Journal article