Nanoscale etching: dissolution of III-As and Ge in HCl/H2O2 solutions

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Authors
van Dorp, Dennis; Weinberger, David; Van wonterghem, S.; Arnauts, Sophia; Strubbe, Katrien; Holsteyns, Frank; De Gendt, Stefan
Conference
Semiconductor Cleaning Science and Technology 14 - SCST 14
Title
Nanoscale etching: dissolution of III-As and Ge in HCl/H2O2 solutions
Publication type
Proceedings paper
Embargo date
9999-12-31
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