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Demonstration of a cost effective Cu electroless TSV metallization scheme
Publication:
Demonstration of a cost effective Cu electroless TSV metallization scheme
Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandersmissen, Kevin
;
Inoue, Fumihiro
;
Velenis, Dimitrios
;
Li, Yunlong
;
Dictus, Dries
;
Frees, Bart
;
Van Huylenbroeck, Stefaan
;
Kondo, M.
;
Seino, T.
;
Heylen, Nancy
;
Struyf, Herbert
;
van der Veen, Marleen
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1900
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Acq. date: 2025-10-29
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Metrics
Views
1900
since deposited on 2021-10-23
1
last week
Acq. date: 2025-10-29
Citations