Show simple item record

Advances in metrology for complex epitaxial systems embedded in small volums

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorKumar, Arul
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorDelmotte, Joris
dc.contributor.authorConard, Thierry
dc.contributor.authorNuytten, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-23T00:22:45Z
dc.date.available2021-10-23T00:22:45Z
dc.date.issued2015-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26100
dc.sourceIIOimport
dc.titleAdvances in metrology for complex epitaxial systems embedded in small volums
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage133
dc.source.endpage134
dc.source.conference9th International Conference on Silicon Epitaxy and Heterostructures - ICSI9
dc.source.conferencedate18/05/2015
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record