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Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics of AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs
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Authors
Wu, Tian-Li
;
Marcon, Denis
;
De Jaeger, Brice
;
Van Hove, Marleen
;
Bakeroot, Benoit
;
Stoffels, Steve
;
Groeseneken, Guido
;
Decoutere, Stefaan
;
Roelofs, Robin
Conference
IEEE International Reliability Physics Symposium - IRPS
Title
Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics of AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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