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Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices

dc.contributor.authorHantschel, Thomas
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMalave, A.
dc.contributor.authorKulisch, W.
dc.contributor.authorOesterschulze, E.
dc.contributor.authorBuechel, D.
dc.date.accessioned2021-09-30T12:08:22Z
dc.date.available2021-09-30T12:08:22Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2620
dc.sourceIIOimport
dc.titleTip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
dc.typeOral presentation
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceMNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.
dc.source.conferencelocation
imec.availabilityPublished - imec


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