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Lateral NWFET optimization for beyond 7nm nodes

dc.contributor.authorYakimets, Dmitry
dc.contributor.authorJang, Doyoung
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorEneman, Geert
dc.contributor.authorMertens, Hans
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorMallik, Arindam
dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorCollaert, Nadine
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.authorThean, Aaron
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-23T01:19:36Z
dc.date.available2021-10-23T01:19:36Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26212
dc.sourceIIOimport
dc.titleLateral NWFET optimization for beyond 7nm nodes
dc.typeProceedings paper
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorMallik, Arindam
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecMallik, Arindam::0000-0002-0742-9366
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceInternational Conference on IC Design and Technology - ICICDT
dc.source.conferencedate1/06/2015
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7165887
imec.availabilityPublished - imec


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