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Experimental study of sub-DSA resolution assist features (SDRAF)

dc.contributor.authorYi, Linda
dc.contributor.authorBekaert, Joost
dc.contributor.authorGronheid, Roel
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorNafus, Kathleen
dc.contributor.authorWong, H.-S. Philip
dc.date.accessioned2021-10-23T01:22:33Z
dc.date.available2021-10-23T01:22:33Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26218
dc.sourceIIOimport
dc.titleExperimental study of sub-DSA resolution assist features (SDRAF)
dc.typeProceedings paper
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage94231F
dc.source.conferenceAlternative Lithographic Technologies VII
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210779
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9423


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