dc.contributor.author | Yu, Hao | |
dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Rosseel, Erik | |
dc.contributor.author | Peter, Antony | |
dc.contributor.author | Lee, Joon-Gon | |
dc.contributor.author | Song, Woo-Bin | |
dc.contributor.author | Demuynck, Steven | |
dc.contributor.author | Chiarella, Thomas | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Kubicek, Stefan | |
dc.contributor.author | Everaert, Jean-Luc | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Barla, Kathy | |
dc.contributor.author | Kim, Daeyong | |
dc.contributor.author | Collaert, Nadine | |
dc.contributor.author | Thean, Aaron | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-10-23T01:24:16Z | |
dc.date.available | 2021-10-23T01:24:16Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26221 | |
dc.source | IIOimport | |
dc.title | 1.5×10-9 Ω·cm² Contact Resistivity on Highly Doped Si:P
Using Ge Pre-amorphization and Ti Silicidation | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Yu, Hao | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.imecauthor | Peter, Antony | |
dc.contributor.imecauthor | Demuynck, Steven | |
dc.contributor.imecauthor | Chiarella, Thomas | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Kubicek, Stefan | |
dc.contributor.imecauthor | Everaert, Jean-Luc | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Barla, Kathy | |
dc.contributor.imecauthor | Collaert, Nadine | |
dc.contributor.imecauthor | Thean, Aaron | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.orcidimec | Yu, Hao::0000-0002-1976-0259 | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
dc.contributor.orcidimec | Peter, Antony::0000-0001-5941-0563 | |
dc.contributor.orcidimec | Everaert, Jean-Luc::0000-0002-0660-9090 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 592 | |
dc.source.endpage | 595 | |
dc.source.conference | IEEE International Electron Devices Meeting - IEDM | |
dc.source.conferencedate | 7/12/2015 | |
dc.source.conferencelocation | Washington, D.C. USA | |
imec.availability | Published - imec | |