Authors

Hemmes, K.; Hamstra, M. A.; Koops, K. R.; Wind, M. M.; Schram, Tom; De Laet, Jan; Bender, Hugo

Journal

Thin Solid Films

Volume

313-14

Title

Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster

Publication type

Journal article

Embargo date

9999-12-31