Cost-effective cleaning for advanced Si-processing

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Authors
Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Knotter, D. M.; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Schaekers, Marc; Snee, Peter; Teerlinck, Ivo; Vos, Rita
Conference
Technical Digest International Electron Devices Meeting - IEDM
Title
Cost-effective cleaning for advanced Si-processing
Publication type
Proceedings paper
Embargo date
9999-12-31
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